Methods of nanotube films and articles

ABSTRACT

Nanotube films and articles and methods of making the same. A conductive article includes an aggregate of nanotube segments which contact other nanotube segments to define a plurality of conductive pathways along the article. Segments may have different lengths and may be shorter than the article. Conductive articles may be made on a substrate by forming a nanotube fabric on the substrate, and defining within the fabric a pattern corresponding to the conductive article. The nanotube fabric may be grown on the substrate using a catalyst, such as a gas phase a metallic gas phase catalyst. The nanotube fabric may be formed by depositing a solution of suspended nanotubes on the substrate, which may be spun to create a spin-coating of the solution. The solution may be deposited by dipping the substrate into the solution. The nanotube fabric may be formed by spraying an aerosol having nanotubes onto the substrate.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a division of U.S. patent application Ser. No.10/128,117, filed Apr. 23, 2002 now U.S. Pat. No. 6,835,591, entitledMethods of Nanotube Films and Articles, which is a continuation-in-partof U.S. patent application Ser. No. 09/915,093 filed Jul. 25, 2001 nowU.S. Pat. No. 6,919,592, entitled Electromechanical Memory Array UsingNanotube Ribbons and Method for Making Same, U.S. patent applicationSer. No. 09/915,173, filed Jul. 25, 2001, now U.S. Pat. No. 6,643,165,entitled Electromechanical Memory Having Cell Selection CircuitryConstructed with Nanotube Technology; and U.S. patent application Ser.No. 09/915,095, filed Jul. 25, 2001, now U.S. Pat. No. 6,574,130,entitled Hybrid Circuit Having Nanotube Electromechanical Memory, all ofwhich are incorporated herein by reference in their entirety.

BACKGROUND

1. Technical Field

This invention relates in general to carbon nanotube films, fabrics,layers, and articles and in particular to making electrically conductivearticles from carbon nanotube films, fabrics, or layers for a variety ofuses in circuits or the like.

2. Discussion of Related Art

The reliable fabrication of electrically conductive, ultra-thin metalliclayers and electrodes in the sub-10 nm regime is problematic, see, e.g.,S. Wolf, Silicon Processing for the VLSI era; Volume 2—ProcessIntegration (Lattice Press, Sunset Beach, 1990). Metal films in thissize regime are usually non-continuous and not conductive overmacroscopic distances. Furthermore, these sub-10 nm films are prone tothermal damage by electrical current making them unsuitable forapplications such as electrical interconnects in semiconductor devices.Thermal damage of thin metal interconnects caused by their low heatconductivities is one of the main factors inhibiting dramaticminiaturization and performance improvements of highly integratedsemiconductor devices.

Conventional interconnect technologies have a tendency to suffer fromthermal damage and metal diffusion eroding the performance of thesemiconductor devices especially from degradation of the electricalproperties. These effects become even more pronounced with sizereduction in current generation 0.18 um and 0.13 um structures, e.g. bymetal diffusion through ultra-thin gate oxide layers.

There is therefore a need in the art for conductive elements that mayoperate well in contexts having high current densities or in extremethermal conditions. This includes circuit contexts with very smallfeature sizes but includes other high current density extreme thermalenvironment contexts as well. There is also a need for conductiveelements that will be less likely to diffuse undesirable amounts ofcontaminants into other circuit elements.

SUMMARY

The invention provides nanotube films and articles and methods of makingthe same. Under one aspect of the invention, a conductive articleincludes an aggregate of nanotube segments in which the nanotubesegments contact other nanotube segments to define a plurality ofconductive pathways along the article.

Under other aspects of the invention, the nanotube segments may besingle walled carbon nanotubes, or multi-walled carbon nanotubes. Thevarious segments may have different lengths and may include segmentshaving a length shorter than the length of the article.

The articles so formed may be disposed on substrates, and may form anelectrical network of nanotubes within the article itself.

Under other aspects of the invention, conductive articles may be made ona substrate by forming a nanotube fabric on the substrate, and defininga pattern within the fabric in which the pattern corresponds to theconductive article.

Under other aspects of the invention, the nanotube fabric is formed bygrowing the nanotube fabric on the substrate using a catalyst, forexample, in which the catalyst is a gas phase catalyst, or in which thecatalyst is a metallic gas phase catalyst.

Under other aspects of the invention, the nanotube fabric is formed bydepositing a solution of suspended nanotubes on a substrate. Thedeposited solution may be spun to create a spin-coating of the solution.

Under other aspects of the invention, the solution may be deposited bydipping the substrate into the solution.

Under other aspects of the invention, the nanotube fabric is formed byspraying an aerosol having nanotubes onto a surface of the substrate.

The invention provides a method of making a film of conductivenanotubes. Under one aspect of the invention a substrate is provided anda vapor-phase catalyst is introduced to foster growth of nanotubes. Acarbon source is also introduced to grow a layer of nanotubes that aresubstantially parallel to a major surface of the substrate.

Under another aspect of the invention, the vapor-phase catalyst is ametallocene.

The invention provides a method of making a film of conductivenanotubes. Under one aspect of the invention a substrate is provided anda vapor-phase catalyst is introduced to foster growth of nanotubes. Acarbon source is also introduced to grow a layer of nanotubes that aresubstantially parallel to a major surface of the substrate.

Under another aspect of the invention, the vapor-phase catalyst is ametallocene.

Under another aspect of the invention, conductive articles are made on asubstrate, by forming a nanotube fabric on the substrate; defining apattern within the fabric in which the pattern corresponds to theconductive article; and removing a portion of the fabric so that thepatterned fabric remains on the substrate to form conductive articles.

Under another aspect of the invention, conductive articles are made on asubstrate, by providing a substrate, introducing a vapor-phase catalystto foster growth of nanotubes, and introducing a carbon source to grow alayer of nanotubes that are substantially parallel to a major surface ofthe substrate.

Under another aspect of the invention, conductive articles are made on asubstrate, by providing a substrate; providing a patterned layer ofmaterial; providing a catalyst that fosters growth of nanotubes; andproviding a carbon source, so as to grow nanotubes substantiallyparallel to a major surface of the substrate in regions defined by thepattern.

Under another aspect of the invention, the patterned layer of materialis an insulator or a semiconductor and wherein the nanotubes grow overthe patterned material.

Under another aspect of the invention, the patterned layer is apatterned metal layer and wherein the nanotubes grow in areas other thanthe patterned metal layer.

BRIEF DESCRIPTION OF THE DRAWING

In the Drawing,

FIG. 1 illustrates a nanotube belt crossbar memory device according tocertain embodiments of the invention;

FIGS. 2A-B illustrate two states of a memory cell according to certainembodiments of the invention;

FIGS. 3-3 a illustrates acts of making memory devices according tocertain embodiments of the invention;

FIGS. 4-11 illustrate several forms of creating an intermediatestructure used to make memory devices according to certain embodimentsof the invention;

FIG. 12 illustrates the non-woven nanotube fabric, or matted nanotubelayer, used to make certain embodiments of the invention;

FIG. 13 illustrates the matted nanotube layer in relation to hidden,underlying traces of certain embodiments of the invention;

FIG. 14 illustrates addressing logic of certain embodiments of theinvention;

FIG. 15 illustrates a hybrid technology embodiment of the invention inwhich the memory core uses nanotube technology;

FIG. 16 illustrates a hybrid technology embodiment of the invention inwhich the memory core and addressing lines use nanotube ribbontechnology;

FIG. 17-17 a illustrates acts of making electrically conductive articlesaccording to certain embodiments of the invention;

FIG. 18 illustrates how electrically conductive articles according tocertain embodiments of the invention may be used to connect electricalcomponents;

FIG. 19 illustrates a way of creating an intermediate structureaccording to certain embodiments of the invention; and

FIG. 20 illustrates a non-woven nanotube fabric, or matted nanotubelayer, used to make certain embodiments of the invention.

DETAILED DESCRIPTION

New electromechanical memory arrays and methods for making same aredisclosed in which electromechanical memory cells are created thatoperate analogously to the NTWCM devices disclosed in WO 01/03208, whichis hereby incorporated by reference in its entirety. However, unlike theNTWCM devices disclosed in WO 01/03208, new ribbons or belts made from amatted layer of nanotubes or a non-woven fabric of nanotubes are used asan electrically conductive element. At points in this disclosure, theribbons are referred to as traces or electrically conductive articles.In some instances, the ribbons are suspended, and in other instancesthey are disposed on a substrate. In some instances, they are used todeflect to certain states under electrical control, and in otherinstances they do not move and instead are used simply to carry anelectrical current or voltage. The new nanotube belt structures arebelieved to be easier to build at the desired levels of integration andscale (in number of devices made) and the geometries are more easilycontrolled. The new nanotube ribbons are believed to be able to moreeasily carry high current densities without suffering the above-outlinedproblems experienced or expected with metal traces.

Under certain embodiments of the invention, electrically conductivearticles may be made from a nanotube fabric, layer, or film. Carbonnanotubes with tube diameters as little as 1 nm are electricalconductors that are able to carry extremely high current densities, see,e.g., Z. Yao, C. L. Kane, C. Dekker, Phys. Rev. Lett. 84, 2941 (2000).They also have the highest known heat conductivity, see, e.g., S.Berber, Y.-K. Kwon, D. Tomanek, Phys. Rev. Lett. 84, 4613 (2000), andare thermally and chemically stable, see, e.g., P. M. Ajayan, T. W.Ebbesen, Rep. Prog. Phys. 60, 1025 (1997). However, using individualnanotubes is problematic because of difficulties in growing them withsuitably controlled orientation, length, and the like. Creating tracesfrom nanotube fabrics allows the traces to retain many if not all of thebenefits of individual nanotubes. Moreover, traces made from nanotubefabric have benefits not found in individual nanotubes. For example,since the traces are composed of many nanotubes in aggregation, thetrace will not fail as the result of a failure or break of an individualnanotube. Instead, there are many alternate paths through whichelectrons may travel within a given trace. In effect, a trace made fromnanotube fabric creates its own electrical network of individualnanotubes within the defined trace, each of which may conduct electrons.Moreover, by using nanotube fabrics, layers, or films, currenttechnology may be used to create such traces.

Nanotube Ribbon Crossbar Memories (NTRCM)

Because the new nanotube belt crossbar memory devices operateanalogously to NTWCM, the description of their architecture andprinciples of operation is brief. Reference may be made to WO 01/03208for fuller description and background.

FIG. 1 illustrates an exemplary electromechanical memory array 100constructed according to principles of preferred embodiments of theinvention.

The array has a plurality of non-volatile memory cells 103 which can bein an “on” state 105 or “off” state 106. The actual number of such cellsis immaterial to understanding the invention but the technology maysupport devices having information storage capacities equivalent to orlarger than modern non-volatile circuit devices.

Each memory cell 103 includes a nanotube ribbon 101 suspended by one ormore supports 102 over electrical traces or wires, e.g., 104.

Each crossing of a ribbon 101 and a wire, e.g., 104 forms a crossbarjunction and defines a memory cell. Under certain embodiments, each cellmay be read or written by applying currents and or voltages toelectrodes 112 which are in electrical communication with ribbons 101 orthrough electrodes (not shown) in communication with traces or wires104. The supports 102 are made from a layer 108 of silicon nitride(Si₃N₄). Below layer 108 is a gate oxide layer 109 separating then-doped silicon traces 104 from an underlying silicon wafer 110.

Referring conjointly to FIGS. 1-2B, junction 106 illustrates the cell ina first physical and electrical state in which the nanotube ribbon 101is separated from corresponding trace 104. Junction 105 illustrates thecell in a second physical and electrical state in which the nanotuberibbon 101 is deflected toward corresponding trace 104. In the firststate, the junction is an open circuit, which may be sensed as such oneither the ribbon 101 or trace 104 when so addressed. In the secondstate, the junction is a rectified junction (e.g., Schottky or PN),which may be sensed as such on either the tube 101 or trace 104 when soaddressed.

Under certain embodiments, the nanotube ribbon 101 may be held inposition at the supports by friction. In other embodiments the ribbonmay be held by other means, such as by anchoring the ribbons to thesupports using any of a variety of techniques. This friction can beincreased through the use of chemical interactions including covalentbonding through the use of carbon compounds such as pyrenes or otherchemically reactive species. Evaporated or spin-coated material such asmetals, semiconductors or insulators especially silicon, titanium,silicon oxide or polyimide could also be added to increase the pinningstrength. The nanotube ribbons or individual nanotubes can also bepinned through the use wafer bonding to the surface. See R. J. Chen etal., “Noncovalent Sidewall Functionalization of Single-Walled CarbonNanotubes for Protein Immobilization,” J. Am. Chem. Soc., 123, 2001,3838-39 and Dai et al., Appl. Phys. Lett., 77, 2000, 3015-17 forexemplary techniques for pinning and coating nanotubes by metals. Seealso WO01/03208 for techniques.

Under certain preferred embodiments as shown in FIGS. 2A-B, a nanotuberibbon 101 has a width of about 180 nm and is pinned to a support 102preferably fabricated of silicon nitride. The local area of trace 104under ribbon 101 forms an n-doped silicon electrode and is positionedclose to the supports 102 and preferably is no wider than the belt,e.g., 180 nm. The relative separation 208 from the top of the support102 to the deflected position where the belt 101 attaches to electrode206 (see FIG. 2B) should be approximately 5-50 nm. The magnitude of theseparation 208 is designed to be compatible with electromechanicalswitching capabilities of the memory device. For this embodiment, the5-50 nm separation is preferred for certain embodiments utilizingribbons 101 made from carbon nanotubes, but other separations may bepreferable for other materials. This magnitude arises from the interplaybetween strain energy and adhesion energy of the deflected nanotubes.These feature sizes are suggested in view of modem manufacturingtechniques. Other embodiments may be made with much smaller (or larger)sizes to reflect the manufacturing equipment's capabilities.

The nanotube ribbon 101 of certain embodiments is formed from anon-woven fabric of entangled or matted nanotubes (more below). Theswitching parameters of the ribbon resemble those of individualnanotubes. Thus, the predicted switching times and voltages of theribbon should approximate the same times and voltages of nanotubes.Unlike the prior art which relies on directed growth or chemicalself-assembly of individual nanotubes, preferred embodiments of thepresent invention utilize fabrication techniques involving thin filmsand lithography. This method of fabrication lends itself to generationover large surfaces especially wafers of at least six inches. (Incontrast, growing individual nanotubes over a distance beyond submillimeter distances is currently unfeasible.) The ribbons shouldexhibit improved fault tolerances over individual nanotubes, byproviding redundancy of conduction pathways contained with the ribbons.(If an individual nanotube breaks other tubes within the rib provideconductive paths, whereas if a sole nanotube were used the cell would befaulty.) Moreover, the resistances of the ribbons should besignificantly lower than that for an individual nanotubes, thus,decreasing its impedance, since the ribbons may be made to have largercross-sectional areas than individual nanotubes.

FIG. 3 illustrates a method of making certain embodiments of NTRCMdevices 100. A first intermediate structure 302 is created or provided.In the illustrated embodiment, the structure 302 includes a siliconsubstrate 110 having an insulating layer 109 (such as silicon dioxide)and a silicon nitride layer (Si₃N₄) 108 that defines a plurality ofsupports 102. In this instance, the supports 102 are formed by rows ofpatterned silicon nitride, though many other arrangements are possible,such as a plurality of columns. Conductive traces 104 extend betweensupports 102. In this instance, the traces 104 are shown as essentiallycontacting the supports 102, but other arrangements are possible as areother geometries; for example, spaces may exist between trace 104 andsupport 102 and trace 104 may be fashioned as a wire or may havenon-rectangular transverse, cross-sections, including triangular ortrapezoidal. Sacrificial layers 304 are disposed above the traces 104 soas to define one planar surface 306 with the upper surface of thesupports 102. This planar surface, as will be explained below,facilitates growth of a matted nanotube layer of certain embodiments.

Once such a structure 302 is created or provided, the upper surface 306receives a catalyst 308. For example, under certain embodiments, acatalyst metal 308, containing iron (Fe), molybdenum (Mo), cobalt orother metals, is applied by spin-coating or other application techniquesto create a second intermediate structure 310.

A matted layer 312 of nanotubes is then grown into a non-woven fabric ofsingle-walled carbon nanotubes (SWNTs) to form a third intermediatestructure 314. For example, the second intermediate structure 310 may beplaced into an oven and heated to a high temperature (for example, about800-1200° C.) while gases containing a carbon source, hydrogen and inertgas, such as argon or nitrogen, are flowed over the upper surface. Thisenvironment facilitates the generation or growth of the matted layer orfilm 312 of single-walled carbon nanotubes. The layer 312 is primarilyone nanotube thick and the various tubes adhere to one another via Vander Waals forces. Occasionally, one nanotube grows over the top ofanother, though this growth is relatively infrequent due to the growthtendencies of the material. Under some embodiments (not shown), thecatalyst 308 may be patterned to assist in growing the nanotubes withspecific densities either more or less dense as is desired. Whenconditions of catalyst composition and density, growth environment, andtime are properly controlled, nanotubes can be made to evenly distributeover a given field that is primarily a monolayer of nanotubes. Propergrowth requires control of parameters including but not limited tocatalyst composition and concentration, functionalization of theunderlying surface, spin coating parameters (length and RPM), growthtime, temperature and gas concentrations.

A photoresist may then be applied to the layer 312 and patterned todefine ribbons in the matted layer of nanotubes 312. The ribbon patternscross (for example, perpendicularly) the underlying traces 104. Thephotoresist is removed to leave ribbons 101 of non-woven nanotube fabriclying on planar surface 306 to form fourth intermediate structure 318.

The fourth intermediate structure 318 has portions 320 of its underlyingsacrificial layer 304 exposed as shown. The structure 318 is thentreated with an acid, such as HF, to remove the sacrificial layer 304,including the portion under the ribbons 101, thus forming an array 322of ribbons 101 suspended over traces 104 and supported by supports 102.

Subsequent metalization may be used to form addressing electrodes, e.g.,112 shown in FIG. 1.

One aspect of the above technique is that the various growth,patterning, and etching operations may use conventional techniques, suchas lithographic patterning. Currently, this may entail feature sizes(e.g., width of ribbon 101) of about 180 nm to as low as 130 nm, but thephysical characteristics of the components are amenable to even smallerfeature sizes if manufacturing capabilities permit.

As will be explained below, there are many possible ways of creating theintermediate structures or analogous structures described above. FIG. 4,for example, shows one way to create the first intermediate structure302

A silicon wafer 400 is provided with an oxide layer 402. The oxide layeris preferably a few nanometers in thickness but could be as much 1 μm. Asilicon nitride (Si₃N₄) layer 404 is deposited on top of the oxidesurface 402. The silicon nitride layer is preferably at least 30 nmthick.

The silicon nitride layer 404 is then patterned and etched to generatecavities 406 to form support structure 407. With modern techniques thecavity width may be about 180 nm wide or perhaps smaller. The remainingsilicon nitride material defines the supports 102 (e.g., as row, orperhaps columns).

A covering 408 of n-doped silicon is then deposited to fill the cavities406. The covering 408 for exemplary embodiments may be about 1 μm thickbut may be as thin as 30 nm.

The covering 408 is then processed, for example by self-flattening ofthick silicon layers or by annealing, to produce a planar surface 306,discussed above, to form structure 411. In the case of self-flattening,reactive ion etching (RIE) with end-point detection (EPD) may beutilized until the upper surface 410 of the etched silicon nitride isreached.

The structure 411 is then oxidized to form and define sacrificial layers304 of SiO₂ about 10-20 nm deep into planar surface 306.

The unconverted, remaining portions of silicon form traces 104.

FIG. 5 shows another method that may be used to create the NTRCM devices100 of certain embodiments. A support structure 407, like that describedin connection with FIG. 4, is provided. A layer 514 of n-doped siliconis then added using a CVD process, sputtering or electroplating. Undercertain embodiments, layer 514 is added to be about half the height ofthe Si₃N₄ supports 102.

After the layer 514 is added, an annealing step is performed to yield aplanarized surface 306 to form a structure 411 like that describedabove. The annealing step causes the silicon of layer 514 to flow intothe cavities 406.

Like that described in connection with FIG. 4, the structure 411 is thenoxidized to form and define sacrificial layers 304 of SiO₂ about 10-20nm deep into planar surface 306.

FIG. 6 shows another approach for forming an alternative firstintermediate structure 302′. In this embodiment, a silicon substrate 600is covered with a layer 602 of silicon nitride having a height 604 of atleast 30 nm.

The silicon nitride layer 602 is then patterned and etched to generatespacings 606 and to defined supports 102. The etching process exposes aportion 608 of the surface of silicon substrate 600.

The exposed silicon surface 608 is oxidized to generate a silicondioxide (SiO₂) layer 610 having a thickness of a few nm. These layers610 eventually insulate traces 104 analogously to the way insulatinglayer 109 did for the above-described structures 302.

Once the insulating layers 610 have been created, the traces 104 may becreated in any of a variety of manner. FIG. 6 illustrates the processingsteps of FIGS. 4-5 used to create such traces to illustrate this point.

FIG. 7 shows another approach for forming first intermediate structure302. A silicon substrate 700 having a silicon dioxide layer 702 and asilicon nitride layer 704 receives a patterned photoresist layer 706.For example, a photoresist layer may be spin-coated on layer 704 andsubsequently exposed and lithographically developed.

Reactive ion etching (RIE) or the like may then be used to etch theSi₃N₄ layer 704 to form cavities 708 and to define supports 102.

Afterwards, n-doped silicon 710 may be deposited in the cavities 708.Under certain embodiments silicon is deposited to a height about equalto the height 712 of the Si₃N₄ supports 102.

The photoresist 706 and silicon 710 on top of the photoresist 706 arethen stripped away to form an intermediate structure 411 like thatdescribed above.

The structure 411 is then oxidized to generate the sacrificial SiO₂layers 304.

FIG. 8 shows another approach for forming first intermediate structure302. Under this approach, a starting structure 800 is provided having alowest silicon layer 802 with a lowest silicon dioxide layer 804 on topof it. A second silicon layer 806 is on top of layer 804 and a secondsilicon dioxide layer 808 is on top of the second silicon layer 806.

The top silicon dioxide (SiO₂) layer 808 is patterned byphotolithography to create an RIE mask 810. The mask is used to etch theexposed portions 812 of second silicon layer 806 down to the firstsilicon dioxide layer 804. This etching creates cavities 814 and definestraces 104.

The cavities 814 are filled and covered with silicon nitride (Si₃N₄)816.

The Si₃N₄ covering 816 is backetched with RIE to the same height 818 asthe remaining portions of the SiO₂ layer 806 covering the n-dopedsilicon electrodes 104 (which form the sacrificial layer 304).

FIG. 9 shows an approach for forming an alternative first intermediatestructure 302″. Under this approach, a structure like 407 (shown in FIG.4, but not FIG. 9) is provided. In this instance, the Si₃N₄ supports 102have a height of about 30 nm. A thin layer of metal 902 is deposited ontop of the Si₃N₄ supports 102 and on top of the exposed portions SiO₂ atthe bottom of the cavities 904 as depicted by item 903. Metal 902 and903 form temporary electrodes. A layer of n-doped silicon 906 may thenbe deposited or grown by electroplating, covering the electrode 903until the silicon 906 achieves a height 908 at the top of the support102 and contacting electrode 902. The growth process may be controlledby the onset of a current flow between the lower and upper metalelectrodes 902,3.

The exposed metal electrodes 902 may then be removed by wet chemicalmethods or dry chemical methods. This forms an intermediate structure411′ like the structure 411 described above, but with a buried electrode903, as an artifact of the silicon growing process.

The structure 411′ is then oxidized to form sacrificial layers 304 atthe exposed portions of silicon, as described above. For example, thelayers 304 may be grown to a thickness of about 10 nm.

FIG. 10 shows another approach for forming first intermediate structure302. A silicon substrate 1002 having a layer of silicon dioxide 1004 ontop of it and a second layer 1006 of silicon (n-doped) on top of layer1004 is used as a starting material. A mask layer 1008 isphotolithographically patterned on top of layer 1006.

Using nitridization techniques, exposed portions 1010 of n-doped siliconlayer 1006 are chemically converted to Si₃N₄ supports 102. Theunconverted portions of layer 1006 form traces 104.

The mask 1008 is removed forming a structure 411 like that describedabove.

The exposed portions 1012 of silicon surface are then oxidized to formthe SiO₂ sacrificial layers 304.

FIG. 11 shows an approach for forming an alternative first intermediatestructure 302′″. Under this approach a silicon substrate 1102 is layeredwith a thin film 1104 of Si₃N₄ as a starting structure. On top of thesilicon nitride layer 1104, n-doped silicon is added andlithographically patterned, by RIE, to form traces 104.

The surfaces of traces 104 are oxidized to form the SiO₂ layer 1106which acts as an alternative form of sacrificial layer 304′.

The structure is overgrown with Si₃N₄ 1108 and back etched to form aplanar surface 306 and to form alternative first intermediate structure302′″. As will be evident to those skilled in the art, under thisapproach, when the sacrificial layer is subsequently removed, traces 104will be separated from supports 102. Other variations of this techniquemay be employed to create alternative transverse cross-sections of trace104. For example, the traces 104 may be created to have a rounded top,or to have a triangular or trapezoidal cross section. In addition, thecross section may have other forms, such as a triangle with taperedsides.

As was explained above, once a first intermediate structure is formed,e.g., 302, a matted nanotube layer 312 is provided over the planarsurface 306 of the structure 302. In preferred embodiments, thenon-woven fabric layer 312 is grown over the structure through the useof a catalyst 308 and through the control of a growth environment. Otherembodiments may provide the matted nanotube layer 312 separately andapply it directly over the structure 302. Though structure 302 underthis approach preferably includes the sacrificial layer to provide aplanar surface to receive the independently grown fabric, thesacrificial layer may not be necessary under such an approach.

Because the growth process causes the underside of such nanotubes to bein contact with planar surface 306 of intermediate structure 302, theyexhibit a “self-assembly” trait as is suggested by FIG. 12. Inparticular, individual nanotubes tend to adhere to the surface on whichthey are grown whenever energetically favorable, such that they formsubstantially as a “monolayer.” Some nanotubes may grow over another sothe monolayer is not expected to be perfect. The individual nanotubes donot “weave” with one another but do adhere with one another as aconsequence of Van der Waals forces. FIG. 12 is an approximate depictionof an actual nanotube non-woven fabric. Because of the small featuresizes of nanotube, even modern scanning electron microscopy cannot“photograph” an actual fabric without loss of precision; nanotubes havefeature sizes as small as 1-2 nm which is below the precision of SEM.FIG. 12 for example, suggests the fabric's matted nature; not clear fromthe figure, however, is that the fabric may have small areas ofdiscontinuity with no tubes present. Each tube typically has a diameter1-2 nm (thus defining a fabric layer about 1-2 nm) but may have lengthsof a few microns but may be as long as 200 microns. The tubes may curveand occasionally cross one another. Tubes attach to one another via Vander Waals forces.

In certain embodiments, nanotubes grow substantially unrestrained in thex-and y-axis directions, but are substantially restricted in the z-axis(perpendicular to page of FIG. 12) as a consequence of the self-assemblytrait. Other embodiments may supplement the above approach to growingmatte 312 with the use of field-oriented or flow-oriented growthtechniques. Such supplementation may be used to further tailor growthsuch that any growth in one planar axis (e.g. the -x-axis) is retarded.This allows for a more even coverage of the desired area with a planarinterwoven monolayer coating of nanotubes with a controllable density.

A plan view of the matted nanotube layer 312 with underlying silicontraces 104 is shown in FIG. 13.

As explained above, once the matted nanotube layer 312 is provided overthe surface 306, the layer 312 is patterned and etched to define ribbons101 of nanotube fabric that cross the supports 102. The sacrificiallayer is then removed (e.g., with acid) forming the array 322 describedabove in connection with FIG. 3. Because the matted layer of nanotubes312 form a non-woven fabric that is not a contiguous film, etchants orother chemicals may diffuse between the individual nanotube “fibers” andmore easily reach the underlying components, such as the sacrificiallayer.

Subsequent metalization may be used to form addressing electrodes, e.g.,112 shown in FIG. 1, as outlined above. Other embodiments use nanotubetechnology to implement addressing of memory cells instead of usingmetallized electrodes 112 and addressing lines (not shown).

More specifically, under certain embodiments described above, nanotubesare used to form NTRCM arrays. Certain embodiments use nanotubetechnology, whether in individual wire or belt form, to implementaddressing logic to select the memory cell(s) for reading or writingoperations. This approach furthers the integration of nanotubetechnology into system design and may provide beneficial functionalityto higher-level system design. For example, under this approach thememory architecture will not only store memory contents in non-volatilemanner but will inherently store the last memory address.

The nanotube-based memory cells have bistability characterized by a highratio of resistance between “0” and “1” states. Switching between thesestates is accomplished by the application of specific voltages acrossthe nanotube belt or wire and the underlying trace, in which at leastone of the memory cell elements is a nanotube or a nanotube ribbon. Inone approach, a “readout current” is applied and the voltage across thisjunction is determined with a “sense amplifier.” Reads arenon-destructive, meaning that the cell retains its state, and nowrite-back operations are needed as is done with DRAM.

FIG. 14 depicts a branching binary select system, or decoder, 1400. Aswill be explained below, decoder 1400 may be implemented with nanotubesor nanotube ribbon technology. Moreover, the decoder may be constructedon the same circuit component as a nanotube memory cell array, e.g.,NTRCM or NTWCM.

A perpendicular intersection of two lines 1404 and 1406 depicted as adot 1402 indicates a junction of two nanotubes or nanotube ribbons. Inthis regard, the interaction is analogous to a “pass transistor” foundin CMOS and other technology, in which the intersection may be opened orclosed.

Locations such as 1420 where one nanotube or nanotube ribbon may crossanother but which are not intended to create a crossbar junction may beinsulated from one another with a lithographically patterned insulatorbetween the components.

For the sake of clarity, the decoder illustrated is for a 3-bit binaryaddress carried on addressing lines 1408. Depending on the value of theencoding the intersections (dots) will be switched to create only onepath through which sensing current I may pass to select lines 1418.

To use this technique, a “dual rail” representation 1408 of each bit ofthe binary address is fashioned externally so that each of the addressbits 1410 is presented in true and complementary form. Thus, line 1406may be the logical true version of address line 1408 a and line 1407 maybe the logical complement of address line 1408 a. The voltage values ofthe representation 1408 are consistent with that needed to switch acrossbar junction to the “1” or “0” state as described above.

In this fashion an address 1408 may be used to supply a sense current Ito a bit or row of bits in an array, e.g., to nanotubes or nanotuberibbons. Likewise, the same approach may be used to sense a given trace,for example, selecting specific array column(s) to read sense from inconjunction with selecting a row. Thus this approach may be used for Xand/or Y decoding both for reading and for writing operations.

Certain embodiments of the invention provide a hybrid technology circuit1500, shown in FIG. 15. A core memory cell array 1502 is constructedusing NTWCM or NTRCM, and that core is surrounded by semiconductorcircuits forming X and Y address decoders 1504 and 1506; X and Y buffers1508 and 1510; control logic 1512 and output buffers 1514. The circuitrysurrounding the NTWCM or NWBCM core may be used for conventionalinterfacing functions, including providing read currents and sensingoutput voltages.

In other embodiments, the X and Y address decoders 1504 and 1506 may besubstituted with the nanotube wire or belt addressing techniquediscussed above. In these embodiments the core would include memorycells and addressing logic.

In certain embodiments, the hybrid circuit 1500 may be formed by using ananotube core (having either just memory cells or memory cells andaddressing logic) and by implementing the surrounding circuitry using afield programmable gate array. The core and gate array circuitry may becontained in a single physical package if desired. Or, they may bepackaged separately. For example, a hermitically packaged nanotubecircuit (having memory or memory and addressing logic) may be combinedwith a PLD/FPGA/ASIC in which the I/O interfacing logic is contained.The resulting compact chipset provides access to the benefits of the NTmemory for the user of the product, while maximizing the use of“off-the-shelf” technologies, which may be utilized on an as-neededbasis by the manufacturer.

FIG. 16 depicts one possible implementation 1600 of the hybridtechnology. A FPGA chip 1602 containing the buffering and control logic(described above) is connected via conducting traces on a (perhapsmultilayer) printed circuit board (PCB) 1604 to a nanotube (NT) chip1606 containing the memory cells and addressing logic.

This particular embodiment is suggested to conform to the PCI busstandard, typical of today's personal computers. Other passivecircuitry, such as capacitors, resistors, transformers, etc. (notpictured) would also be necessary to conform to the PCI standard. Afront-side bus speed of 200 MHz-400 MHz is annotated, suggesting thekinds of external clock speeds such a chipset might run at. This speedis limited by the PCB interconnects and FPGA/PLD/ASIC speed, and alsothe chip packages, not the NT memory cell speed.

Carbon Nanotube Films, Layers, Fabrics, and Articles

The above embodiments of NTRCM and addressing lines use traces orelectrically conductive articles made from nanotube layers 312, such asthose shown in FIGS. 3 and 12. The layers may have thickness of about 1nm or less, i.e., the thickness of a given nanotube. The nanotube matte312 is grown or deposited on a surface, such as that of a silicon wafer,to form a contiguous film of a given density. The two dimensional filmcan then be patterned to generate electrically conductive lines ortraces ranging in width from 1 nm (the intrinsic minimum size of ananotube) to hundreds of microns or greater, depending on theapplication and context. The pattern can be generated at multiple lengthand width scales to allow the interconnection of various sizedsemiconductor devices such as transistors or memory elements andeventually fanning out to bond pads or other interconnecting materialsor constructs. The nanotube interconnects can be metallized if necessaryto connect different materials because of their intrinsic propertiesthat allow easy contact to metallic or semiconductor materials.

The traces and electrically conductive articles may be used in otherforms of circuits. For example, nanotube traces may be used for theirability to withstand high current densities, normally found in verysmall sized traces (e.g., sub 10 nm regimes). They may also be used toreduce the likelihood of contaminating other circuit features.

FIG. 17, for example, illustrates an exemplary use of nanotube ribbons,traces, or electrically conductive articles over a substrate. (Byinspection, one can see that FIG. 17 resembles FIG. 3, but in thisinstance the film 312 is grown over a substrate, instead of growing itover an intermediate structure 310.) In this example, a siliconsubstrate 110 has an oxide layer 109, similar to that shown in FIG. 3.To facilitate growth or deposition of the film 312, a planar surface(shown as 306 in FIG. 3, but not shown in FIG. 17) may be generated. Afilm 312 with single- and/or multi-walled nanotubes may then be grownover the combination, e.g., using CVD, or deposited on the combination,e.g., via spin coating. The film 312 is primarily one nanotube thick ifsingle-walled nanotubes are used but can be substantially thicker ifmulti-walled nanotubes are used, e.g., up to 1000 nm.

If the film is to be grown, a catalyst may be used, as described above.However, the catalyst (shown as 308 in FIG. 3, but not shown in FIG. 17)does not need to be deposited directly on the surface of the substrate;instead or in addition, it may be provided in a gaseous form as part ofthe CVD process. For example, a gas phase metallic species such asferrocene could be used. Ferrocene and other gas phase metallic speciesgrow carbon nanotubes as do other species containing iron, molybdenum,tungsten, cobalt and other transition metals. These are all suitable forforming catalysts in the gas phase. The metallic gas-phase catalyst canbe optimized or modified along with the proper temperature, pressure,surface preparation and growth time to generate a nanotube matte 312.

If the film 312 is to be deposited, pre-grown nanotubes may be used. Forexample, under certain embodiments of the invention, nanotubes may besuspended in a solvent in a soluble or insoluble form and spin-coatedover the surface to generate the nanotube film 312. In such anarrangement the film may be one or more nanotubes thick, depending onthe spin profile and other process parameters. Appropriate solventsinclude dimethylformamide, n-methyl pyrollidinone, n-methyl formamide,orthodichlorobenzene, paradichlorobenzene, 1,2, dichloroethane,alcohols, water with appropriate surfactants such as sodiumdodecylsulfate or TRITON X-100 or others. The nanotube concentration anddeposition parameters such as surface functionalization, spin-coatingspeed, temperature, pH and time can be adjusted for controlleddeposition of monolayers or multilayers of nanotubes as required.

The nanotube film 312 could also be deposited by dipping the wafer orsubstrate in a solution of soluble or suspended nanotubes. The filmcould also be formed by spraying the nanotubes in the form of an aerosolonto a surface.

When conditions of catalyst composition and density, growth environment,and time are properly controlled, nanotubes can be made to evenlydistribute over a given field that is primarily a monolayer ofnanotubes.

Upon formation of the nanotube matte 312, a photoresist layer may bespin-coated on the nanotube film 312 and patterned by exposure or thelike to define conductive traces. In the example of FIG. 17, the tracesare shown as parallel straight traces, but the trace definition may takeother forms. The defined traces can have a width of at least 1 nm and asmuch as 100 microns or more depending upon the type of device which isto be interconnected.

Once so defined, the exposed photoresist may be processed to remove someof the layer but to leave the traces 101. Subsequent metallization maybe used to form addressing electrodes or a fanned interconnectstructure, e.g., 1706 shown in FIG. 17.

With reference to FIG. 18, nanotube ribbon patterns 1802 may then beconnected to other ribbons 101, metallic traces (not shown) orelectronic features 1806. For example, with reference to intermediatestructure 1800, the nanotube traces 101 may be connected to nanotubetraces 1802 having different feature sizes, such as width. The traces101 may also be connected to elements 112, which may be metal contactsor bonding pads (though not shown to scale in this figure). Withreference to intermediate structure 1804, the traces 1010 may connect tomemory elements such as in 1804, which may be formed as NTRCM cells orwith semiconductor sites. With reference to intermediate structure 1808,the traces may connect electronic processing sites or logic 1806. Thoughnot necessarily drawn to scale, the traces 101 may also connect bondpads, represented by item 112.

While these interconnects may primarily be formed of a monolayer ofnanotubes, multilayer ribbons and mattes can also be envisioned usingproper growth conditions. This requires control of parameters includingbut not limited to catalyst composition and concentration,functionalization of the underlying surface, spin coating parameters(length and RPM, for example 40 seconds, 50-5000 rpm), growth time,temperature and gas concentrations.

One aspect of the above technique is that the various growth,deposition, patterning, and etching operations may use conventionaltechniques, such as lithographic patterning. With current technology,traces may be made to have widths of about 180 nm to as low as 130 nm.However, the physical characteristics of the traces 101 are amenable toeven smaller feature sizes if manufacturing capabilities permit.

Conventional interconnect technologies have a tendency to suffer fromthermal damage and metal diffusion eroding the performance of thesemiconductor devices especially from degradation of the electricalproperties. These effects become even more pronounced with sizereduction in current generation 0.18 um and 0.13 um structures, e.g. bymetal diffusion through ultra-thin gate oxide layers. In contrast,carbon nanotube ribbons 101 are not beset with these problems. They aresubstantially more robust having the highest known thermalconductivities and are not prone to thermal failure. Furthermore, nometal or dopant diffusion can occur since they are constructed entirelyof covalently bound carbon atoms.

FIG. 19 shows another approach for forming first intermediate structure302. A silicon substrate 1900 having a silicon dioxide layer 1902receives a patterned photoresist layer 1904. For example, a photoresistlayer may be spin-coated on layer 1902 and subsequently exposed andlithographically developed yielding cavities 1906 and a mask pattern1908.

Afterwards, n-doped silicon or metal such as molybdenum, tungsten ortantalum 1910 and a sacrificial layer 1912 such as aluminum oxide may bedeposited in the cavities 1906, also forming corresponding features 1914and 1916.

The photoresist 1912, material 1914 and aluminum oxide (Al₂O₃) 1916 ontop of the photoresist 1912 are then stripped away to form anintermediate structure 1918 with electrodes 104 and sacrificial layer304. A spin-on-glass (SOG) such as flowable oxide (FOX) is spin- coatedover the structure 1918 and annealed using a ramped temperature protocolat 600° C. using standard techniques forming a SiO₂ layer 1920 at aheight of from 200-2000 nm above the top of the sacrificial layer 1912.

Reactive ion etching (RIE) or the like may then be used to etch the SiO₂layer 1920 to form a structure 302 with supports 102.

The choice of electrode material is limited by the method by which thenanotubes are placed upon the substrate surface. The three above methodsinclude spin-coated catalyst-based growth, gas-phase catalyst-assistedCVD and spin-coating or direct deposition of nanotubes. In the case ofthe catalyst-based growth as has been described above the catalyst isdistributed on the surface either by spin-coating, or dipping thesubstrate in the catalyst material followed by standard washingprotocols. In each of these cases the nanotubes are then grown via a CVDprocess at 800° C. using a combination of hydrogen and carbon-containingprecursor gas as has been described above. Thus, electrode materialswhich are sufficiently robust to survive these temperatures would bepreferred including molybdenum, tungsten, tantalum, germanium, copperand alloys thereof. The electrode material can be constructed of asingle or stacked structure of materials including silicon, tungsten,molybdenum, tantalum, copper and others. The stacked electrode structuremay assist with or be sufficient in creating a Schottky barriersufficient for rectification of each memory bit.

In the event that the nanotubes are grown using a gas-phase catalystsuch as ferrocene, it is possible to envision substantially lowertemperatures being required for growth allowing the use of electrodematerials that melt at a substantially lower temperature less than 800°C. and as low as 400° C. Some gas-phase catalysts of interest mayinclude cobalt, tungsten, molybdenum or rhenium metallocenes containingfive of six-membered rings. These compounds can with the properknowledge of inorganic chemistry be synthesized and brought by the useof a bubbler into the gas-phase to act as nucleation sites on substratesfor nanotube growth. Of course these materials would be substantivelycompatible with the typical CMOS processes known in the literature andused by standard industrial fabrication facilities.

In the event that nanotubes are deposited on a surface at roomtemperature by spin-coating of a solution or suspension of nanotubesthen the choice of electrode materials is expanded substantially. Inthis case there is no high temperature step and any metal typicallycompatible with standard CMOS metallization conditions would beacceptable especially, aluminum, and alloys thereof.

The sacrificial layer 304 can be constructed of Al₂O₃, metal oxides,salts, metals and other materials. The intermediate structure 302 can beformed using a variety of materials to form the supports 102 includingSOG, SiO₂ and others. In the event that a low temperature spin-coatingof nanotube protocol is chosen the materials suitable to be sacrificiallayers expands substantially. This could include materials such as PMMAor other polymers, metals such tungsten, chromium, aluminum, bismuth andother transition and main group metals. Also other semiconductors suchas germanium and insulators such as salts, oxides and otherchalcogenides.

The choice of materials for the support layer greatly depends upon themethod chosen for nanotube growth and other factors. In the even that alow-temperature process is chosen for placing nanotubes on the surface,one can envision utilizing such materials as Al₂O₃, silicon monoxide,semiconductors, insulators and polymers such as polyimide.

The materials selection process is confined to those materials that arecompatible with the fabrication process described above. It isunderstood by those sufficiently skilled in the art that upon selectionof a particular electrode material, the sacrificial layer and supportmaterials naturally become limited based upon typical processing stepsavailable in semiconductor fabrication. Likewise if a particularsacrificial layer is chosen the choices of electrode and sacrificiallayer materials is suitably limited. Furthermore, upon selection of aparticular support material it follows that the electrode andsacrificial layer materials choice is likewise limited.

FIG. 20 shows an Atomic Force Microscopic (AFM) image of an exemplarynanotube fabric 312. In this figure, each nanotube is about 1.5 nm indiameter. (The image is fuzzy due to the inherent limitations in themicroscopy, not due to the actual texture of a given nanotube.) Thisimage is at the lateral resolution limit of AFM.

Though most of the disclosure above is written as if the fabric weremade of nanotubes of the same type, e.g., all single walled, the fabricsmay be composed of all multi-walled structures or of a combination ofsingle- and multi-walled structures.

Other Embodiments

In order to facilitate the growth of interconnects or electrodematerials it may become useful to first form a pattern using standardlithographic methods to define regions where the nanotubes are intendedto grow in a horizontal fashion over the surface. Such an approach hasbeen used to pattern SiO₂ structures to grow thick multiwalled verticalnanotubes. In a similar approach patterned SiO₂ can be used for thepurpose of growing horizontal nanotube films with a thickness of 1-1000nm to create structures of the form described above such as 101. Othermaterials which provide a support for nanotube growth and nucleationsuch as insulators and metal oxides may be useful when used in concertwith properly chosen gas-phase metallocenes or other vaporizablemetallic precursors to yield patterned nanotube ribbons. This underlyingpatterned layer could also act as a sacrificial layer which upon removalwould form a suspended nanotubes. This method of growth represents aform of “positive” growth whereby the nanotubes use the prepatternedsurface as a nucleation site.

In a further embodiment one can envision using a “negative” growthmethod whereby the lithographically patterned substrate contains ametallic or other material which does not support nanotube growth. Whena proper gas-phase precursor such as a metallocene or similar compoundis supplied the nanotubes would substantively grow only in the regionswithout the patterned material. The removal of an underlying materialcould provide suspended nanotubes 101 or interconnect structures uponthe removal of the patterned metallic species.

In yet another embodiment, instead of using wet-chemical removal ofsacrificial layer to suspend nanotubes at specific height overelectrodes, a controlled etch of the electrode (i.e. 15 nm etch of 0.18um wide electrode) can be used; e.g. metal (e.g. copper) andsemiconductor (e.g. silicon) electrodes can be etched at etch rates of afew nanometer per second.

In another embodiment pinning of nanotubes onto the supports using anoverlayed thin coating to prevent slipping of tubes during operation.This would open “windows” just over the memory cell itself.

The electrical properties of the layers and electrically conductivearticles can be tuned by controlling the cross section of the nanotuberibbons. For example, the ribbon thickness may be increased at a givenwidth and nanotube density. The higher the cross section, the greaterthe number of conduction channels leading to enhanced electricalproperties.

The method of preparing of the nanotube ribbons allows continuousconductivity even over rough surface topologies. In contrast, typicalevaporation of metallic electrodes would suffer from structural andthus, electrical defects.

Besides carbon nanotubes other materials with electronic and mechanicalproperties suitable for electromechanical switching could be envisioned.These materials would have properties similar to carbon nanotubes butwith different and likely reduced tensile strength. The tensile strainand adhesion energies of the material must fall within a range to allowbistability of the junction and electromechanical switching propertiesto exist within acceptable tolerances.

For the purpose of integrating CMOS logic for addressing two approachescan be envisioned. In the first embodiment the nanotube array will beintegrated before metallization but after ion implantation andplanarization of the CMOS logic devices. A second method involves growthof the nanotube arrays before fabrication of the CMOS devices involvingion implementation and high temperature annealing steps. Upon completionof these steps the final metallization of both the nanotube ribbons andthe CMOS devices will proceed using standard and widely used protocols.

Electrodes consisting of n-doped silicon on top of some metal orsemiconductor line can also be envisioned. This will still providerectifying junctions in the ON state so that no multiple currentpathways exist.

In addition to rectifying junctions, there are other widely accepted andused methods to prevent the occurrence of electrical crosstalk (i.e.multiple current pathways) in crossbar arrays. Tunnel barriers on top ofthe static, lithographically fabricated electrodes prevent the formationof ohmic ON states. No leakage currents at zero bias voltage will occurbut a small bias voltage has to be applied for the charge carriers toovercome this barrier and tunnel between the crossing lines.

Methods to increase the adhesion energies through the use of ionic,covalent or other forces can be envisioned to alter the interactionswith the electrode surfaces. These methods can be used to extend therange of bistability with these junctions.

Nanotubes can be functionalized with planar conjugated hydrocarbons suchas pyrenes which may then aid in enhancing the internal adhesion betweennanotubes within the ribbons.

Certain of the above aspects, such as the hybrid circuits and thenanotube technology for addressing, are applicable to individualnanotubes (e.g., using directed growth techniques, etc.) or to nanotuberibbons.

It will be further appreciated that the scope of the present inventionis not limited to the above-described embodiments but rather is definedby the appended claims, and that these claims will encompassmodifications of and improvements to what has been described.

1. A method of making a non-woven film of conductive nanotubes, themethod comprising providing a substrate having a substantially planartop surface defining a major surface of the substrate, the major surfaceof the substrate comprising a patterned array of conductive elements,introducing a vapor-phase catalyst to foster growth of nanotubes, andintroducing a carbon source to grow a layer of nanotubes that aredisposed on and substantially parallel to the major surface of thesubstrate.
 2. The method of claim 1 wherein the vapor-phase catalyst isa metallocene.
 3. The method of claim 1 wherein the nanotubes includesingle-walled carbon nanotubes.
 4. The method of claim 1 wherein thenanotubes include multi-walled carbon nanotubes.
 5. The method of claim1, wherein the major surface of the substrate further comprises anordered array of insulative elements.
 6. The method of claim 1, whereinthe major surface of the substrate further comprises an ordered array ofsacrificial material.
 7. The method of claim 6, further comprisingremoving the sacrificial material after introducing the carbon source.8. The method of claim 1, wherein the conductive elements aresubstantially parallel to one another.
 9. A method of making conductivearticles, comprising: providing a substrate, the substrate including apatterned array of conductive elements; providing a patterned layer ofmaterial; providing a catalyst that fosters growth of nanotubes;providing a carbon source, so as to grow randomly oriented nanotubessubstantially parallel to a major surface of the substrate in regionsdefined by the pattern and over the patterned array of conductiveelements.
 10. The method of claim 9 wherein the carbon source and thecatalyst are introduced in a single act.
 11. The method of claim 9wherein the carbon source and the catalyst are introduced as separateacts.
 12. The method of claim 9 wherein the patterned layer of materialis an insulator or a semiconductor and wherein the nanotubes grow overthe patterned material.
 13. The method of claim 9 wherein the patternedlayer is a patterned metal layer and wherein the nanotubes grow in areasother than the patterned metal layer.
 14. The method of claim 9, whereinthe substrate further comprises an ordered array of insulative elements.15. The method of claim 9, wherein the substrate further comprises anordered array of sacrificial material.
 16. The method of claim 15,further comprising removing the sacrificial material after introducingthe carbon source.
 17. The method of claim 9, wherein the conductiveelements are substantially parallel to one another.